Free-formed quartz glass ingots and method for making the same

ABSTRACT

A method to form quartz glass ingots of ultra low contamination and defect levels by firing a high-purity quartz form as the feedstock, wherein the quartz glass ingot is free-formed on a platen rotating concentrically with the feedstock quartz article.

CROSS REFERENCE TO RELATED APPLICATIONS

This application claims the benefits of U.S. 60/689,507 filed Jun. 10,2005, which patent application is fully incorporated herein byreference.

FIELD OF INVENTION

The invention relates to quartz glass ingots of low impurity level anddefect concentration for use in semiconductor processing applications.The ingots are made by using direct-drawn quartz articles as afeedstock.

BACKGROUND OF INVENTION

Semiconductor wafer processing for microchip fabrication requires, amongother steps, sequential and repeated steps such as masking, deposition,and etching. In the etching step, the wafer and the chamber in which theetching takes place are exposed to an aggressive environment, e.g.,reactive ion etch and plasma etch. Due to the aggressive nature of theetch processes, the etch chamber materials must be selected carefullyfor reliable wafer processing. Therefore, the innermost etch chambercomponents are typically fabricated from quartz glass. Etching of purequartz glass theoretically results in liberation of only silicon andoxygen species. These are less harmful to the wafer, as compared totransition metals and other elements, which would modify the compositionand therefore the semiconducting properties of the wafer.

One example of a chamber component is a quartz glass window. In oneconfiguration, the quartz glass window serves as a partition between thechamber atmosphere and the energy source. Because the window istypically positioned above the semiconductor wafer to be etched, it isimperative that the quartz glass window is as chemically pure aspossible, i.e., having less than 50 ppm impurities. It is alsoimperative that the window has a very low concentration of bulk defects,e.g., foreign material inclusions and bubbles. Such bulk defects, whenexposed to the etching atmosphere at the surface of the quartz glasswindow, can cause inhomogeneous etching of the window, thus generatingquartz glass particles. Loose particulate matter within the etch chambercan be severely detrimental to the wafer. The size of such particles (1to 10 microns) relative to the etched features (about 50 nanometers) onthe wafer surface makes the particles potentially quite destructive.These particles may block gates and destroy conductive vias on the waferor contaminate the wafer with impurity elements. Therefore, waferetching chambers require quartz glass windows that etch slowly anduniformly without generating particulates.

Making quartz ingots using a sand-based flame fusion process is known inthe art. Generally, this involves feeding a particulate quartz materialthrough or near an oxy-fuel flame to gradually build up a massive glassingot through an accretion process of relatively slow deposition rates,e.g., at 5 lbs/hr or less. The flame fusion process has the advantage ofexposing individual particles to the full power of the heat source.However, this deposition-oriented process has the disadvantage ofexposing each particle to contamination in the feed system and in thefurnace atmosphere with each sand particle being an opportunity to forma defect in the, ingot. The individual sand grains are exposed to theheat of the oxy-fuel flame and the product of the combustion reaction,water. The exposure yields quartz articles with hydroxyl concentrationof greater than 150 ppm, which changes the temperature dependentviscosity of the fused glass, thus limiting its end-use applications.

Published application JP-61122131 A discloses a glass ingotmanufacturing device and glass ingots made thereof. U.S. Pat. No.4,612,023 discloses a method for manufacturing stria-free, bubble-freeand homogeneous quartz glass plates. U.S. Pat. No. 6,415,630 disclosesan apparatus for producing a homogeneous quartz glass plate withoutstreaks, in which the melting pot and the quartz glass rod undergo arelative motion perpendicular to the longitudinal axis of the rod.

In the prior art, quartz glass rods may be used as feedstock to formlarger glass shapes. However, interfacial defects associated withmaterial accumulation and overlay may still be experienced. In one priorart process, in which a laminate-type configuration to build up material(laying successive layers of softened glass on top of each other) isused, interfacial defects may result from a number of causes. Theseinclude entrained gas bubbles, entrained discrete impurity particles,entrained chemical impurities, and fold lines. Additional process stepsmay be required to reduce or eliminate such defects in the fused mass.Additionally, the process requires the use of refractory molds orcontainers to form the final shape of the glass ingot. Refractory incontact with the fused glass ingot is a source for contamination thatcan cause defects in the ingots. Furthermore, thermal expansion mismatchbetween the fused quartz glass and the refractory can cause spalling orcracking in the ingot.

There is a still need for ultra-low defect quartz articles from whichsuch components for semiconductor processing assemblies can befabricated, i.e., ingots with a hydroxyl concentration of less than 150ppm and a total defect concentration (bubbles and inclusions greaterthan 10 micrometers in diameter) of less than 150 per cm³.

SUMMARY OF INVENTION

The invention relates to a method for forming a quartz glass ingot ofultra low defects and impurities by firing a high-purity quartz articleas a feedstock, wherein the quartz glass ingot is free-formed on aplaten rotating concentrically with the feedstock quartz article.

In one embodiment, the invention relates to a method for forming aquartz glass ingot having a total defect concentration of less than 50defects per cm³ and a hydroxyl concentration of less than 50 ppm, byfiring a high-purity quartz article as a feedstock, wherein the quartzglass ingot is free-formed on platen rotating concentrically with thefeedstock quartz article.

The invention further relates to quartz glass articles in the form ofingots, plates, blanks, and the like, having a total defectconcentration of less than 50 defects per cm³ and a hydroxylconcentration of less than 50 ppm.

BRIEF DESCRIPTION OF THE DRAWING

FIG. 1 is a schematic diagram of an embodiment for a device for makingthe quartz glass article of the invention.

DETAILED DESCRIPTION OF THE INVENTION

As used herein, approximating language may be applied to modify anyquantitative representation that may vary without resulting in a changein the basic function to which it is related. Accordingly, a valuemodified by a term or terms, such as “about” and “substantially,” maynot to be limited to the precise value specified, in some cases.

As used herein, quartz glass articles refer to quartz glass plates,ingots, blanks, and the like, of various sizes and thickness from whichquartz blanks in the form of rings, flanges (thick rings), plates,disks, windows, etc. can be machined or fabricated.

As used herein, “quartz glass ingot” refers to the end-product of theinvention, which may be in the form of blanks, ingots, plates, and thelike, having a total defect concentration of less than 50 defects percm³ and a hydroxyl concentration of less than 50 ppm. Quartz ingots ofthe invention may be used in window components in semiconductorprocessing chambers.

As used herein the term “reflow” refers to a process inherent to amaterial like quartz or glass, when the material is soft such that itcan flow/melt under action of its own weight, and redistribute itself.

As used herein, a defect refers to either a bubble or an inclusion witha diameter greater than 10 micrometers, and total defect concentrationrefers to the total number of defects per unit volume. Defects may bemeasured by taking samples (e.g., in coupon form) from random locationsin the quartz ingots and examined visually under magnification. Thedefects are counted and the total defection concentration is computedfrom the total count and the total sample volume from multiple samples.

Feedstock to make Quartz Ingots: As used herein, quartz glass feedstockrefers to any fabricated quartz glass article, which may be in the formof rods, tubing, and the like, having either a solid or a tubularcross-section and having a cross-sectional shape with any number ofsides ranging from 3 sides to an infinite number sides, including acircular cross-sectional shape. In one embodiment, the quartz glassfeedstock has a solid cross-section and a circular cross-sectionalshape. In another embodiment, the quartz glass feedstock is a directdrawn quartz glass rod.

As used herein, “quartz glass rod” refers to any fabricated quartz glassarticle that is used as the feedstock to the invention, which may berods, tubing, and the like, having a solid or a tubular cross-section.In one embodiment, the fabricated quartz glass article for use as thefeedstock has a cross-sectional shape with at least 3 sides. In anotherembodiment, the fabricated quartz glass feedstock is a rod having asolid cross-section with a circular cross-sectional shape. In oneembodiment, the glass rod has a diameter of between 1 and 100 mm. Inanother embodiment, the glass rod has an outer diameter of between 20and 50 mm.

In one embodiment, the quartz glass rods for use as feedstock aremanufactured from natural quartz crystals. In another embodiment, therods are manufactured from synthetic silica. In a third embodiment, thefeedstock includes rods of natural quartz crystals as well as rods madefrom synthetic silica. In one embodiment, the quartz glass feedstock isa fabricated quartz glass article having a content of at least 85 wt. %SiO2. In another embodiment, the fabricated glass article is a solid ortubular elongated shape that has been sintered from a soot body, or anyother high purity particulate mass made from flame hydrolysis.

Following the feedstock fusion step, manageable lengths of quartz glassrod feedstock may be further annealed to remove hydroxyl (OH) groups andlower the OH concentration below approximately 50 parts per million.Surface and/or end preparation for the rod segments including cleaningsteps are contemplated. It is known in the art that joining of glassrods can be accomplished with conically shaped end regions. In oneembodiment of the present invention, the quartz glass rod feedstocksegments have ends that are formed into a desired end shape thenpre-cleaned before the pre-joining and semi-continuous ingot fusionsteps. The pre-cleaning step is accomplished by any of a variety ofmeans including but not limited to acid washing, detergent washing, orany combination thereof.

Process for Making Quartz Ingots: Referring now to the schematic drawingof FIG. 1, which depicts the fusing or firing apparatus in theinvention. The feedstock to the process is shown in the form of a quartzrod 10. The end-product quartz ingot 11 is end-supported on a platen 7such that its longitudinal axis is in a vertical position. In oneembodiment, platen 7 is positioned on a horizontal turntable (notshown). The platen 7 rotates about a vertical axis by means of a driveshaft 8 connected to a suitable variable speed drive means (not shown)of any known construction, such as for example an electric motor. In oneembodiment, a refractory heat shield and furnace roof (not shown) areprovided in order to further localize heating of the rod feedstock 10.

In one embodiment, the longitudinal axis of feedstock 10 and thevertical axis of platen 7 (and optional turntable) are concentric, suchthat their axes are substantially aligned, e.g., coaxially. Thelongitudinal axis of the end-product ingot 11 is thus similarly alignedwith the axes of feedstock 10 and platen 7, for an axi-symmetric reflowprocess. In another embodiment, there is a maximum eccentricity of nomore than one feedstock diameter between the axes of the feedstock andthe ingot.

A firing/heating source 5 is provided to attain a quartz glassworking/softening/flow temperature in the range of 1400° C. to 2400° C.Heating source 5 may be any of the following, or combinations thereof:resistive heating, RF heating, induction heating, microwave heating,laser heating, electron beam heating, zone heating, plasma torchheating, or a burner.

In one embodiment as illustrated in FIG. 1, a burner 5 is used toprovide heat for reflow of the rod feedstock 10 into large ingots. Sucha burner is ignited and delivers heat to a refractory furnace through aflame column. In one embodiment, the burner is an “oxy-fuel burner,”which is supplied with a combustible gas such as hydrogen, carbonmonoxide, methane or propane, and a combustion-supporting gas such asair or oxygen. The burner may be a type of burner commonly used for thispurpose, such as one in which the center portion has a multi-tubeconstruction. Further, the burner may have a surface mix, partialpre-mix, or fully pre-mixed construction.

In one embodiment, the burner is of the design and construction asdisclosed in U.S. Pat. No. 5,934,893, titled “Burner and Utilization ofSuch Burner in Glass Furnace.” In another embodiment, the heating source5 is moved relative to the rod feedstock 10 for a time sufficient tocompletely fire the feedstock 10. The moving speed may be varied as thefiring progresses to maintain optimum dimensional stability of theproduct ingot. In yet another embodiment, the heating source 5 comprisesa plurality of burners (not shown), e.g., a single top center burner,multiple side burners, and multiple top-side burners, wherein the sideand top-side burners are spaced apart for optimal firing of the rodfeedstock.

The furnace atmosphere may comprise air, or an inert or noble gas. Thefurnace housing can be heated by radiation or induction. In oneembodiment, the refractory furnace 6 is pre-heated by the burner 5before the rod feedstock is introduced for reflow. In one embodiment,the interior of the furnace is first flushed with inert gas. In the nextstep, single pieces of the rod feedstock 10 are fed into the top of thereflow furnace and down onto the rotating platen base 7 where they formthe larger ingot 11. As each rod 10 becomes fused into the larger ingot11, additional feedstock rods are added while maintaining the axialsymmetry of the rod and the fused ingot. The feedstock rods are added ata rate dependent on the temperature of the process and the rate offormation of the fused ingot 11.

In one embodiment, continuous feeding is accomplished by a partialfusion of a rod followed by withdraw of an un-fused length, thenfollowed by introduction of a new feedstock rod. In another embodiment,continuous feeding is accomplished by the fusion of pre-joined rodfeedstock for semi-continuous ingot fusion. In yet another embodiment,large ingots are directly fused from rod feedstock in a continuousprocess. The rod feedstock is made in a furnace by melting quartz sandat fusion temperatures between 1800° C. and 2500° C. with a residencetime on the order of 1 to 10 hours, as the rod is being continuouslydrawn and fed directly into the process of the invention as feedstock10.

In one embodiment, feedstock rods of different properties, e.g., madefrom natural silica, are alternatively fed in with rods made fromsynthetic silica, to produce quartz ingots having a layered structurewith alternating layers of lower quality quartz material and higherquality quartz material. In an embodiment of a cladding structure, theingot has an interior portion of a higher quality material made with ahigher quality feedstock, and an outer portion made with a lower qualityfeedstock.

As more quartz glass material accumulates, the large fused ingot 11 istranslated downward, away from the heat source 5 at a rate such that theouter diameter of the ingot is free-formed in a controlled manner. Oncean acceptably large ingot 11 is formed, the rod feed 10 is stopped andthe top surface of the ingot is flattened by continued flow fromapplication of heat by the burner. Finally, the application of heat fromthe heat source 5 is discontinued and the ingot 11 is extracted from thefurnace and cooled for post processing and inspection.

In one embodiment, the quartz glass ingot 11 is fused at a rate between5 and 50 pounds per hour. In another embodiment, the quartz glass ingotis fused at a rate between 10 and 20 pounds per hour.

In the axi-symmetric reflow process of the invention, there is littlepotential for reflow defects in the fused ingot since the outer surfaceof the rod becomes the outer surface of the fused end-product. The bulkof the fused end-product is shielded from potential entrainment ofdefects and/or impurities that may be present in the feed system or thefurnace atmosphere. As the axi-symmetric method prohibits successivelaminations or layering of the feedstock material, there is littleopportunity for interfaces to form within the ingot end-product.

Additionally in the process of the invention with the “free-formed”ingot, no container or mold is needed to form or maintain the diameterand or shape of the ingot. The absence of the mold (typically made ofrefractory brick material) helps reduce the potential for refractorycontamination in the ingot, while also reducing the indirect materialcost. Further, the free-formed ingot of the invention is less likely tofracture due to stresses associated with thermal expansion mismatchbetween the quartz glass ingot and refractory mold materials. Althoughan ingot mold is not necessary, platen 7 may include a raised edgeprovided such that such edge does not mold or shape the end-productingot.

In the post-finishing operation, the end portion of end-product ingot 11that is in direct contact with the refractory platen 7 is typicallyremoved.

Ingots Produced From Process of the Invention: As described, in theprocess of the invention using direct-drawn quartz glass rod as afeedstock rather than fusing quartz particulate in a deposition-orientedprocess, fusion quality is maintained at a high and well-controlledlevel. As rod feedstock is direct-drawn in a furnace where the quartzsand raw material is melted and held at fusion temperatures between1800° C. and 2500° C. for long residence times on the order of 1 to 10hours before being drawn into the fused product, the drawn quartz glassrod material is quite chemically homogeneous and has very lowconcentrations of bulk defects like inclusions or bubbles.

The use of rod feedstock with low concentrations of defects producesquartz glass articles in the form of ingots, plates, blanks, and thelike, having a total defect concentration of less than 150 defects percm³ and a hydroxyl concentration of less than 150 ppm. In anotherembodiment, the glass ingots produced have less than 50 defects per cm³and a hydroxyl concentration of less than 50 ppm. In yet anotherembodiment, the ingots have less than 150 defects per cm³ and a hydroxylconcentration of less than 50 ppm. In a fourth embodiment, less than 50defects per cm³ and a hydroxyl concentration of less than 150 ppm.

In one embodiment, the glass ingots produced have a hydroxylconcentration of less than 30 ppm over the hydroxyl concentration of thequartz feedstock. In one example, the amount is less than 20 ppm overthe hydroxyl concentration of the quartz rods used as the feedstock.

Besides the very high fusion quality and economically favorable fusionrates, the process of the invention enables fusion of large-sized quartzglass articles. In one embodiment, the articles are in the form of glassingots having a circular cylindrical shape, with an outer diameterbetween 6 inches and 24 inches and a height between 6 inches and 24inches. In a third embodiment, the quartz glass ingot formed has adiameter ranging from 2 to 100 times the diameter of the quartz glassrod as the feedstock. In another embodiment, the ingot has a diameter of5 to 50 times the diameter of the rod feedstock. In yet anotherembodiment, a diameter of 5 to 20 times the diameter of the rodfeedstock.

EXAMPLES

The invention is further illustrated by the following non-limitingexamples:

Example 1

A quartz ingot commercially available from Tosoh (or can also beobtained from St. Gobain) made using a sand-based flame fusion processwas used as the comparative example.

Example 2

Using the process of the invention, quartz rods commercially availablefrom General Electric Company as “Type 214” were used as the feedstockto produce ingots having a size of 12-inch diameter and 10 inchesheight. Type 214 quartz rod is characterized as having high purity,elevated temperature characteristics and low coefficient of thermalexpansion with an (OH) level at less than 20 ppm.

Coupons of 3″ diameter and about ¼″ thickness were randomly cut from thequartz ingots and measured for OH concentration and defect levels. TheOH measurements were made using infrared spectroscopy. Total defectdensity was visually measured under magnification. The results aretabulated below. Examples OH (ppm) Total Defect Density (#/cm³) 1.Sand-based Flame Fusion 150 to 200 >150 2. Axi-symmetric <50 <50Free-forming

This written description uses examples to disclose the invention,including the best mode, and also to enable any person skilled in theart to make and use the invention. The patentable scope of the inventionis defined by the claims, and may include other examples that occur tothose skilled in the art. Such other examples are intended to be withinthe scope of the claims if they have structural elements that do notdiffer from the literal language of the claims, or if they includeequivalent structural elements with insubstantial differences from theliteral languages of the claims. All citations referred herein areexpressly incorporated herein by reference.

1. A quartz glass article in the form of a blank, ingot, or a plate,having a total defect concentration of less than 150 defects per cm³ anda hydroxyl concentration of less than 150 ppm.
 2. The quartz glassarticle of claim 1, having a defect concentration of less than 150defects per cm³ and a hydroxyl concentration of less than 50 ppm.
 3. Thequartz glass article of claim 1, having a defect concentration of lessthan 50 defects per cm³ and a hydroxyl concentration of less than 150ppm.
 4. The quartz glass article of claim 1, having a defectconcentration of less than 50 defects per cm³ and a hydroxylconcentration of less than 50 ppm.
 5. The quartz glass article of claim1, wherein the quartz glass article is made in a process wherein afabricated quartz glass article is used as feedstock, and wherein thequartz feedstock is selected from at least one of rods and tubings. 6.The quartz glass article of claim 5, wherein the quartz glass feedstockis at least a fabricated quartz glass article having a high silicacontent of greater than 85% SiO2.
 7. The quartz glass article of claim5, wherein said quartz glass feedstock has a hydroxyl impurityconcentration and wherein the hydroxyl concentration of said quartzglass article is less than 30 ppm higher than the hydroxyl concentrationof the quartz glass feedstock.
 8. The quartz glass article of claim 5,wherein at least a quartz glass rod is used as the feedstock, andwherein the quartz glass rod is drawn directly from a rod makingprocess.
 9. The quartz glass article of claim 5, wherein the quartzglass feedstock comprises a plurality of quartz rod segments beingjoined and fused prior to being used as the feedstock.
 10. The quartzglass article of claim 5, wherein the quartz glass feedstock is a rodhaving a solid cross-section and a circular cross-sectional shape. 11.The quartz glass article of claim 5, wherein the quartz glass feedstockhas a diameter between 1 and 100 mm.
 12. The quartz glass article ofclaim 12, wherein the quartz glass feedstock has a diameter between 20and 50 mm.
 13. The quartz glass article of claim 5, in the form of aningot.
 14. The quartz glass article of claim 14, wherein the ingot ismade in a process wherein a fabricated quartz glass article in the formof a rod having a diameter between 1 and 100 mm is used as feedstock,and wherein the quartz glass ingot has a diameter ranging from 2 to 100times the diameter of the rod feedstock.
 15. The quartz glass article ofclaim 15, wherein the quartz glass ingot has a diameter ranging from 5to 50 times the diameter of the rod feedstock.
 16. The quartz glassarticle of claim 14, wherein said ingot has an outer diameter between 6inches and 24 inches and a height between 6 inches and 48 inches. 17.The quartz glass article of claim 1, wherein said quartz glass articleis an ingot, and wherein said ingot is made in a process comprising thesteps of: feeding a quartz glass rod as a feedstock into a furnacecontaining a platen rotating in axially symmetry to the quartz glassfeedstock; heating the quartz glass rod to a flow temperature for thequartz glass rod to flow; flow-forming the quartz glass ingot on therotating platen in the absence of a container or mold.
 18. The quartzglass article of claim 18, wherein the axial symmetry has a maximumeccentricity of no more than one feedstock diameter between the axes ofthe feedstock and the ingot.
 19. The quartz glass article of claim 18,wherein the quartz glass ingot is formed at a rate between about 5 and50 pounds per hour.
 20. The quartz glass article of claim 20, whereinthe quartz glass ingot is formed at a rate between 10 and 20 pounds perhour.
 21. The quartz glass article of claim 18, wherein the rodfeedstock is continuously drawn from a melt held at a temperaturebetween 1800° C. and 2500° C., for a period of 1 to 10 hours.
 22. Thequartz glass article of claim 18, wherein the quartz glass feedstockcomprises a plurality of quartz rod segments being joined and fusedprior to being used as the feedstock, for a continuous linear feed intothe process.
 23. The quartz glass article of claim 18, wherein a heatsource is used to apply heat either indirectly or directly onto thequartz glass feedstock, and wherein the heat source is at least oneselected from the group consisting of: resistive heating, RF heating,microwave heating, laser heating, electron beam heating, plasma torchheating, zone heating, induction heating, and burner.
 24. The quartzglass article of claim 24, wherein the heat source is an oxy-fuelburner.
 25. The quartz glass article of claim 24, wherein the heatsource is at least one selected from the group consisting of: a singletop center burner, multiple side burners, and multiple top-side burners.26. A quartz glass article in the form of an ingot having a center coreand an outer portion having outer diameter between 6 inches and 24inches, wherein the center core has a diameter of at least ½ the outerdiameter and with a total defect concentration of less than 150 defectsper cm³ and a hydroxyl concentration of less than 150 ppm.
 27. A processfor manufacturing a quartz glass ingot, comprising the steps of:providing a fabricated quartz glass article as a feedstock, feeding thefused quartz glass feedstock into a furnace containing a platen rotatingin axial symmetry to the quartz glass feedstock, heating the fusedquartz glass feedstock to a temperature sufficient for the quartzfeedstock to melt, thus forming the quartz glass ingot on the rotatingplaten in the absence of a container or mold.
 28. The process of claim28, further comprising the step of annealing the fabricated quartz glassarticle prior to feeding the quartz glass article as feedstock to thefurnace.
 29. The process of claim 28, further comprising the step offusing a plurality of quartz rod segments into a fabricated quartz glassarticle prior to feeding the quartz glass article as feedstock to thefurnace.
 30. The process of claim 28, wherein the axial symmetry has amaximum eccentricity of no more than one feedstock diameter between theaxes of the feedstock and the ingot.
 31. The process of claim 28,wherein the quartz feedstock is selected from at least one of rods andtubings.
 32. The process of claim 28, wherein the quartz glass ingot isformed at a rate between about 5 and 50 pounds per hour.
 33. The processof claim 34, wherein the quartz glass ingot is formed at a rate between10 and 20 pounds per hour.
 34. The process of claim 28, wherein a heatsource is used to apply heat either indirectly or directly onto thequartz glass feedstock, and wherein the heat source is at least oneselected from the group consisting of: resistive heating, RF heating,microwave heating, laser heating, electron beam heating, plasma torchheating, zone heating, induction heating, and burner.
 35. The quartzglass article of claim 36, wherein the heat source is at least oneselected from the group consisting of: a single top center burner,multiple side burners, and multiple top-side burners.